MICRO-MACHINED OPTICAL PRESSURE SENSORS

专利名称：MICRO-MACHINED OPTICAL PRESSURE

SENSORS

发明人：Hong CAI,Jifang TAO,Julius Ming-Lin

TSAI,Aiqun LIU

申请号：US15036792申请日：20141114

公开号：US20160273980A1公开日：20160922

专利附图：

摘要：A micro-machined optical pressure sensor, comprising: a diaphragm configuredto deform when a force is applied thereto; and a sensing micro-ring spaced apart from

the diaphragm by a gap, the gap being variable depending on the force applied on thediaphragm, wherein the sensing micro-ring is configured to produce a resonancewavelength shift when the gap is varied, the resonance wavelength shift indicative of theforce applied to the diaphragm.

申请人：AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH,NANYANGTECHNOLOGICAL UNIVERSITY

地址：Connexis SG,Singapore SG

国籍：SG,SG

更多信息请下载全文后查看