专利名称:Fin field effect transistor
发明人:Hung-Ta Lin,Chu-Yun Fu,Hung-Ming
Chen,Shu-Tine Yang,Shin-Yeh Huang
申请号:US15194222申请日:20160627公开号:US09716091B2公开日:20170725
专利附图:
摘要:A fin field effect transistor (FinFET) including a first insulation region and asecond insulation region and fin there between. A gate stack is disposed over a firstportion of the fin. A strained source/drain material is disposed over a second portion of
the fin. The strained source/drain material has a flat top surface extending over the firstand second insulation regions. The first insulation region may include a tapered topsurface.
申请人:Taiwan Semiconductor Manufacturing Company, Ltd.
地址:Hsin-Chu TW
国籍:TW
代理机构:Haynes and Boone, LLP
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