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Fin field effect transistor

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专利名称:Fin field effect transistor

发明人:Hung-Ta Lin,Chu-Yun Fu,Hung-Ming

Chen,Shu-Tine Yang,Shin-Yeh Huang

申请号:US15194222申请日:20160627公开号:US09716091B2公开日:20170725

专利附图:

摘要:A fin field effect transistor (FinFET) including a first insulation region and asecond insulation region and fin there between. A gate stack is disposed over a firstportion of the fin. A strained source/drain material is disposed over a second portion of

the fin. The strained source/drain material has a flat top surface extending over the firstand second insulation regions. The first insulation region may include a tapered topsurface.

申请人:Taiwan Semiconductor Manufacturing Company, Ltd.

地址:Hsin-Chu TW

国籍:TW

代理机构:Haynes and Boone, LLP

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