RADIATION SYSTEM, RADIATION COLLECTOR, RADIATION B

专利名称：RADIATION SYSTEM, RADIATION

COLLECTOR, RADIATION BEAM

CONDITIONING SYSTEM, SPECTRAL PURITYFILTER FOR RADIATION SYSTEM ANDMETHOD FOR FORMING A SPECTRALPURITY FILTER

发明人：Vadim Yevgenyevich Banine,Wilhelmus

Petrus De Boeij,Antonius Johannes JosephusVan Dijsseldonk,Erik Roelof Loopstra,JanBernard Plechelmus Van Schoot,GerardusHubertus Petrus Maria Swinkels

申请号：US12994930申请日：20090505

公开号：US201102233A1公开日：20110915

专利附图：

摘要：A radiation system is configured to generate a radiation beam. The radiationsystem comprising a chamber that includes a radiation source configured to generateradiation, a radiation beam emission aperture, and a radiation collector configured tocollect radiation generated by the source, and to transmit the collected radiation to theradiation beam emission aperture. The radiation collector includes a spectral purity filterconfigured to enhance a spectral purity of the radiation to be emitted via the aperture.

申请人：Vadim Yevgenyevich Banine,Wilhelmus Petrus De Boeij,Antonius JohannesJosephus Van Dijsseldonk,Erik Roelof Loopstra,Jan Bernard Plechelmus VanSchoot,Gerardus Hubertus Petrus Maria Swinkels

地址：Deurne NL,Veldhoven NL,Hapert NL,Eindhoven NL,Eindhoven NL,Eindhoven NL

国籍：NL,NL,NL,NL,NL,NL

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