RADIATION SYSTEM, RADIATION COLLECTOR, RADIATION B

专利名称：RADIATION SYSTEM, RADIATION

COLLECTOR, RADIATION BEAM

CONDITIONING SYSTEM, SPECTRAL PURITYFILTER FOR A RADIATION SYSTEM ANDMETHOD OF FORMING A SPECTRAL PURITYFILTER

发明人：BANINE, Vadim,DE BOEIJ,

Wilhelmus,LOOPSTRA, Johannes,VANDIJSSELDONK, Antonius,SWINKELS,Gerardus,VAN SCHOOT, Jan

申请号：EP09753772.4申请日：20090505公开号：EP2283388A1公开日：20110216

摘要：A radiation system is configured to generate a radiation beam. The radiationsystem comprising a chamber that includes a radiation source configured to generateradiation, a radiation beam emission aperture, and a radiation collector configured tocollect radiation generated by the source, and to transmit the collected radiation to theradiation beam emission aperture. The radiation collector includes a spectral purity filterconfigured to enhance a spectral purity of the radiation to be emitted via the aperture.

申请人：ASML Netherlands BV

地址：De Run 6501 5504 DR Veldhoven NL

国籍：NL

代理机构：Slenders, Petrus J. W.

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