Vacuum processing system

专利名称：Vacuum processing system发明人：Kengo Ashizawa申请号：US12816750申请日：20100616公开号：US08623457B2公开日：20140107

专利附图：

摘要：A vacuum processing system includes a transfer chamber configured to form avacuum atmosphere through which a target object is transferred. A transfer mechanism isdisposed in the transfer chamber and configured to transfer the target object. A processchamber is connected to the transfer chamber through a first gate valve and configured

to perform a process on the target object within a vacuum atmosphere. A first exhaustport is formed in a bottom of the transfer chamber at the foot of the first gate valve. Afirst gas exhaust section is connected to the first exhaust port and configured to exhaustgas inside the transfer chamber.

申请人：Kengo Ashizawa

地址：Nirasaki JP

国籍：JP

代理机构：Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.

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