AUTOMATIC FOCUSSING DEVICE FOR AN OPTICAL APPLIANC

专利名称：AUTOMATIC FOCUSSING DEVICE FOR AN

OPTICAL APPLIANCE

发明人：CZARNETZKI, NORBERT,SCHERUEBL,

THOMAS,MACK, STEFAN,KUROSAWA,TOSHIRO,HAGEMANN, ECKARD

申请号：EP02743143.6申请日：20020604公开号：EP1393116B1公开日：20051228

摘要：The invention relates to a device for focussing automatically on a measuringpoint (M) on an object (O) which moves in an at least approximately perpendiculardirection (R) to the optical axis (A) of the imaging optics (3). Said device comprises adiaphragm system, the opening of which extends in a parallel direction (R') to thedirection of movement (R)of the measuring point (M); a reception device for the

measuring light has juxtaposed reception regions (e1, e2...en) and is inclined in such a wayagainst the optical axis as to cause the image from the diaphragm device to impact uponthe reception regions (e1, e2...en) at angle a; the reception device and the diaphragmopening are positioned in such a way in relation to each other as to allow the

characteristic measured values to be subsequently measured in the reception regionswhen the measuring point (M) is in or near the focussing position. An evaluation device(12) compares the measured values, which are read sequentially in the reception regions(e1, e2...en), with stored set values and, using values resulting therefrom, produces signalsfor a microscope array, for example, and/or, if deviations are detected, regulating signals

for a regulating device which shifts the direction of movement (R) in the focal plane of theimaging optics (3).

申请人：CARL ZEISS SMS GMBH,ZEISS CARL SMS GMBH,CARL ZEISS SMS GMBH

地址：DE

国籍：DE

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