专利名称：METHOD FOR MANUFACTURING AN
ADHESIVE COATING
发明人：Emmerich, Rudolf,Dreher, Ralf申请号：EP19157492.0申请日：20190215公开号：EP3527692A1公开日：20190821
摘要：The present invention relates to a process for coating a support material,wherein the coating takes place via a plasma-assisted chemical vapor deposition atatmospheric pressure (AP-PECVD) in remote operation and wherein the gas flow rates ofthe plasma gas, the carrier gas and the precursor satisfy the following condition: and theaverage injected power and the gas flow rate of the precursor satisfy the followingcondition:
申请人：FRAUNHOFER-GESELLSCHAFT zur Förderung der angewandten Forschung e.V.
地址：Hansastraße 27c 80686 München DE
国籍：DE
代理机构：Haggenmüller, Christian
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