专利名称:Method for fabricating an electrical
component
发明人:Alejandro Avellan,Thomas Hecht,Stefan
Jakschik,Uwe Schroeder
申请号:US11399811申请日:20060407
公开号:US20060234463A1公开日:20061019
专利附图:
摘要:An electrical component, such as a DRAM semiconductor memory or a field-effect transistor is fabricated. At least one capacitor having a dielectric () and at least one
connection electrode () are fabricated. To enable the capacitors fabricated to haveoptimum storage properties even for very small capacitor structures, the dielectric () orthe connection electrode () are formed in such a manner that transient polarizationeffects are prevented or at least reduced.
申请人:Alejandro Avellan,Thomas Hecht,Stefan Jakschik,Uwe Schroeder
地址:Dresden DE,Dresden DE,Kessel-Lo (Leuven) BE,Dresden DE
国籍:DE,DE,BE,DE
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