Capacity gas sensor and its manufacturing method

专利名称：Capacity gas sensor and its manufacturing

method

发明人：ゲラール，ファビアン,フィリッピ，ティエリー,

グルエーズ，クリステル

申请号：JP2019131535申请日：20190717公开号：JP2020020790A公开日：20200206

专利附图：

摘要：Problem to be solved: to provide a capacitive gas sensor having a designcapable of providing a rapid sensor response and which is not affected by thermal stress.The capacitive gas sensor 200 includesA first electrode 210 andA second electrode 220andDisposed between the first electrode and the second electrode to form a gassensitive capacitor;A gas sensitive dielectric material 240 having a dielectric constant

dependent on the amount of gas compounds absorbed from the environmental mediumandA dielectric electrode material 250 is disposed on a boundary between the gassensitive dielectric material and at least one of the first electrode and the secondelectrode.The dielectric electrode boundary material is adapted to absorb at least onethermally induced expansion of the first electrode and the second electrode to reducemechanical stress to the gas sensitive dielectric material.Diagram

申请人：エムウーアーエス フランス

地址：フランス共和国 ３１３００ トゥールーズ リュ・ガイユ－マリー ４

国籍：FR

代理人：大場 充,堀川 美夕紀,大竹 夕香子,山下 聖子,佐々木 まどか

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