Optical method for the characterization of lateral

专利名称：Optical method for the characterization of

laterally-patterned samples in integratedcircuits

发明人：Humphrey J. Maris申请号：US09404939申请日：19990923公开号：US06321601B1公开日：20011127

专利附图：

摘要：Disclosed is a method for characterizing a sample having a structure disposedon or within the sample, comprising the steps of applying a first pulse of light to a

surface of the sample for creating a propagating strain pulse in the sample, applying asecond pulse of light to the surface so that the second pulse of light interacts with thepropagating strain pulse in the sample, sensing from a reflection of the second pulse achange in optical response of the sample, and relating a time of occurrence of the changein optical response to at least one dimension of the structure.

申请人：BROWN UNIVERSITY RESEARCH FOUNDATION

代理机构：Harrington & Smith

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