Method for producing cyclohexasilane

专利名称：Method for producing cyclohexasilane发明人：Shin-ya Imoto,Takashi Abe,Morihiro

Kitamura,Hikaru Takahashi,TakehikoMorita,Tatsuhiko Akiyama

申请号：US141387申请日：20131223公开号：US09617161B2公开日：20170411

摘要：High purity cyclohexasilane and a method for increasing the purification

efficiency thereto are provided. The method for producing cyclohexasilane of the presentinvention is characterized in that, in distilling crude cyclohexasilane to obtain purifiedcyclohexasilane, the absolute pressure during distillation is set to 2 kPa or less, and theheating temperature of crude cyclohexasilane is set to 25 to 100° C. The cyclohexasilaneof the present invention contains pure cyclohexasilane at a rate of 98% by mass or moreand 100% by mass or less.

申请人：Nippon Shokubai Co., Ltd.

地址：Osaka JP

国籍：JP

代理机构：Wenderoth, Lind & Ponack, L.L.P.

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