IC device inspection apparatus

专利名称：IC device inspection apparatus

发明人：Osamu Kurosu,Kazuhiro Kawaguchi,Kazuya

Tsujino,Yasuyuki Takata,Keisuke Yoshida

申请号：US09607165申请日：20000629公开号：US063770B1公开日：20020423

专利附图：

摘要：An IC device to be inspected is received in a chamber, and an IC tester Judgesperformance of the IC device. An electrical connection device is arranged outside thechamber and has a conductive passage electrically connecting between the IC tester and

the IC device. An IC socket is retained on the electrical connection device, for having theIC device inserted therein. A magnetometric sensor is arranged close to the conductivepassage of the electrical connection device, for detecting a magnetic field generatedwhen electric current is supplied to the IC device. A temperature control device controlsa temperature of the IC device. A control unit controls the temperature control devicebased on a signal delivered from the magnetometric sensor, to maintain the temperatureof the IC device within a predetermined temperature range.

申请人：NEC CORPORATION,Y.A.C. CO., LTD.

代理机构：Frishauf, Holtz, Goodman, Langer & Chick, P.C.

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